Scios 2 HiVac

Focused Ion Beam / Scanning Electron Microscopy


  • 30 kV FEG

  • Gallium-ion-column

  • SE, T1, T2 and DBS Detektors

  • C and Platin deposition

  • Tomography equipment

  • EDAX EDX System

  • Mikromanipulator

  • PraparationPreparation of TEM Lamella

  • Auto slice and view (ASNV)

  • Avizo

Application areas:
SEM imaging
FIB micro/nanostructuring
EDX analysis (point and map analysis)
FIB-SEM Tomography
TEM lamellae preparation  







Room: 00.013
Tel: +49 761 203-95321
Core Facility 1 "Imaging of Materials Systems"
Albert-Ludwigs University Freiburg

Contact Specialist:

Dr. Yi Thomann
Core Facility 1 "Imaging of Materials Systems"
+49 761 203-95073

Usage Fee:

Price: Device-fees
For a quote, access rules and usage conditions
please contact Dr. Yi Thomann

For more information please see our:
Terms of use